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MEMS – micro electro
mechanical systems – one of the fast growing
markets world wide.
Examples for MEMS based on piezoelectric materials are film bulk acoustic resonators (FBAR)
or inkjet printer heads for next generation printers. Cantilevers used as micro switches or
membranes for particle detection are additional examples.
Material characteristics that are of interest for these applications are mainly the
longitudinal and transverse piezoelectric coefficients d33 and d31,
the dielectric coefficient, and mechanical coefficients of the piezoelectric thin film.
aixACCT offers dedicated test equipment to measure these parameters of the MEMS devices with
a guaranteed accuracy. aixACCT accompanies its customers from material testing to quality
assurance during production. This is based on unique electrical and electro-mechanical test
equipment, add-on software tools and simulation services and, finally, the statistical
evaluation of your production cycle.
Products particularly designed with regard to the characterization of MEMS devices are:
- Double Beam Laser Interferometer (DBLI) for piezoelectric and dielectric thin
film measurements,
- Additional sample holder for e31 respectively d33
measurements,
- 200 / 400 V bipolar high voltage Amplifier for sample excitation and poling
- and aixPlorer software tool for further data evaluation and statistical analysis of
batches or certain processes.
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MEMS